Electrical and optical characterisation of capacitively and inductively coupled GEC reference cells

Bill Graham, C.M.O. Mahony, Philip Steen

Research output: Contribution to conferencePaper

Original languageEnglish
Pages3-8
Number of pages6
Publication statusPublished - Jun 2000
EventSymposium D - Measurement Techniques for Technological Plasmas at the 1999 E-MRS Spring Meeting - Strasbourg, France
Duration: 01 Jun 200001 Jun 2000

Conference

ConferenceSymposium D - Measurement Techniques for Technological Plasmas at the 1999 E-MRS Spring Meeting
CountryFrance
CityStrasbourg
Period01/06/200001/06/2000

Cite this

Graham, B., Mahony, C. M. O., & Steen, P. (2000). Electrical and optical characterisation of capacitively and inductively coupled GEC reference cells. 3-8. Paper presented at Symposium D - Measurement Techniques for Technological Plasmas at the 1999 E-MRS Spring Meeting, Strasbourg, France.