Electrical characterisation of ALD Al2O3 and HfO2 films on germanium

D. Tantraviwat, Yee Low, Paul Baine, Neil Mitchell, David McNeill, Mervyn Armstrong, Harold Gamble

Research output: Contribution to conferencePaper

Original languageEnglish
Pages0-0
Number of pages1
Publication statusPublished - Dec 2009
EventMaterials Ireland Conference - Cork, Ireland
Duration: 01 Dec 200901 Dec 2009

Conference

ConferenceMaterials Ireland Conference
CountryIreland
CityCork
Period01/12/200901/12/2009

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