Electrical characterisation of ALD Al2O3 and HfO2 films on germanium

D. Tantraviwat, Yee Low, Paul Baine, Neil Mitchell, David McNeill, Mervyn Armstrong, Harold Gamble

Research output: Contribution to conferencePaper

Original languageEnglish
Pages0-0
Number of pages1
Publication statusPublished - Dec 2009
EventMaterials Ireland Conference - Cork, Ireland
Duration: 01 Dec 200901 Dec 2009

Conference

ConferenceMaterials Ireland Conference
CountryIreland
CityCork
Period01/12/200901/12/2009

Cite this

Tantraviwat, D., Low, Y., Baine, P., Mitchell, N., McNeill, D., Armstrong, M., & Gamble, H. (2009). Electrical characterisation of ALD Al2O3 and HfO2 films on germanium. 0-0. Paper presented at Materials Ireland Conference, Cork, Ireland.