@inproceedings{4508566364b54da7874231ffed9298e3,
title = "Electrical characterisation of PVD germanium resistors with rapid melt growth (RMG) process",
abstract = "This paper presents the electrical characterisation of germanium stripe resistors produced by Physical Vapour Deposition using a Rapid Melt Growth process with either single or multiple micro-crucible materials. Electrical measurement of single germanium stripe resistors were obtained using a Greek cross test structure whereas four-terminal aluminium rail test structures were used for germanium stripe arrays. The electrical characterisation was conducted under dark conditions. Results showed only a slight reduction in germanium sheet resistance compared to that of as-deposited material even after a high temperature (980 °C) crystal growth process. It is believed that the measurements were compromised by contact and leakage current issues. As a result, the electrical characteristics of crystallised germanium could not be investigated properly and the relationship to Raman measurement was not established.",
author = "N. Zainal and Mitchell, {S. J. N.} and McNeill, {D. W.}",
year = "2018",
month = nov,
day = "12",
doi = "10.1063/1.5066750",
language = "English",
isbn = "978-0-7354-1752-6",
volume = "2030",
series = "AIP Conference Proceedings",
publisher = "AIP Publishing",
booktitle = "AIP Conference Proceedings",
edition = "1",
}