Electrical characterisation of SOI substrates incorporating WSix ground planes

Mervyn Armstrong, Michael Bain, Paul Baine, Harold Gamble, David McNeill

Research output: Contribution to conferencePaper

Original languageEnglish
Pages0-0
Number of pages1
Publication statusPublished - Apr 2004
EventNATO Advanced Research Workshop: Science & Technology of Semiconductor-On-Insulator structures devices operating in a harsh environment - Kiev, Ukraine
Duration: 01 Apr 200401 Apr 2004

Conference

ConferenceNATO Advanced Research Workshop: Science & Technology of Semiconductor-On-Insulator structures devices operating in a harsh environment
CountryUkraine
CityKiev
Period01/04/200401/04/2004

Cite this

Armstrong, M., Bain, M., Baine, P., Gamble, H., & McNeill, D. (2004). Electrical characterisation of SOI substrates incorporating WSix ground planes. 0-0. Paper presented at NATO Advanced Research Workshop: Science & Technology of Semiconductor-On-Insulator structures devices operating in a harsh environment, Kiev, Ukraine.