Electrical characteristics of nitrogen incorporated hydrogenated amorphous carbon

Robert McCullough

Research output: Contribution to journalArticlepeer-review

14 Citations (Scopus)
Original languageEnglish
Pages (from-to)2456-2462
Number of pages7
JournalJournal Of Vacuum Science & Technology A-an International Journal Devoted To Vacuum Surfaces And Films
Issue number5
Publication statusPublished - Sep 2001

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Physics and Astronomy (miscellaneous)
  • Surfaces and Interfaces

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