Original language | English |
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Pages (from-to) | 2456-2462 |
Number of pages | 7 |
Journal | Journal Of Vacuum Science & Technology A-an International Journal Devoted To Vacuum Surfaces And Films |
Volume | 19 |
Issue number | 5 |
Publication status | Published - Sept 2001 |
ASJC Scopus subject areas
- Surfaces, Coatings and Films
- Physics and Astronomy (miscellaneous)
- Surfaces and Interfaces