Electrical Properties of High-k Ta O Gate Dielectrics on Strained Ge-Rich Layers

Mervyn Armstrong, Harold Gamble

Research output: Contribution to conferencePaper

Original languageEnglish
Pages483-486
Number of pages4
Publication statusPublished - May 2004
EventIntl Conf on Microelectronics (MIEL) (IEEE Cat. No.04TH8716) - Nis, Serbia
Duration: 01 May 200401 May 2004

Conference

ConferenceIntl Conf on Microelectronics (MIEL) (IEEE Cat. No.04TH8716)
CountrySerbia
CityNis
Period01/05/200401/05/2004

Cite this

Armstrong, M., & Gamble, H. (2004). Electrical Properties of High-k Ta O Gate Dielectrics on Strained Ge-Rich Layers. 483-486. Paper presented at Intl Conf on Microelectronics (MIEL) (IEEE Cat. No.04TH8716), Nis, Serbia.