Electrical Properties of High-k ZrO Gate Dielectrics on Strained Ge-Rich Layers

Mervyn Armstrong, Harold Gamble

Research output: Contribution to conferencePaper

Original languageEnglish
Pages405-407
Number of pages3
Publication statusPublished - May 2004
EventIntl Conf on Microelectronics (MIEL) - Nis, Serbia
Duration: 01 May 200401 May 2004

Conference

ConferenceIntl Conf on Microelectronics (MIEL)
CountrySerbia
CityNis
Period01/05/200401/05/2004

Cite this

Armstrong, M., & Gamble, H. (2004). Electrical Properties of High-k ZrO Gate Dielectrics on Strained Ge-Rich Layers. 405-407. Paper presented at Intl Conf on Microelectronics (MIEL), Nis, Serbia.