Electromigration in copper interconnects

N. McCusker, V.S.C. Len, David McNeill, Mervyn Armstrong, Harold Gamble

Research output: Contribution to conferencePaper

Original languageEnglish
Pages0-0
Number of pages1
Publication statusPublished - Jun 1998
EventEMRS '98 Spring Meeting - Strasbourg, France
Duration: 01 Jun 199801 Jun 1998

Conference

ConferenceEMRS '98 Spring Meeting
CountryFrance
CityStrasbourg
Period01/06/199801/06/1998

Cite this

McCusker, N., Len, V. S. C., McNeill, D., Armstrong, M., & Gamble, H. (1998). Electromigration in copper interconnects. 0-0. Paper presented at EMRS '98 Spring Meeting, Strasbourg, France.