Electromigration in copper interconnects

N. McCusker, V.S.C. Len, David McNeill, Mervyn Armstrong, Harold Gamble

Research output: Contribution to conferencePaper

Original languageEnglish
Pages0-0
Number of pages1
Publication statusPublished - Jun 1998
EventEMRS '98 Spring Meeting - Strasbourg, France
Duration: 01 Jun 199801 Jun 1998

Conference

ConferenceEMRS '98 Spring Meeting
CountryFrance
CityStrasbourg
Period01/06/199801/06/1998

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