Abstract
The electron dynamics in a planar coil inductively coupled plasma (ICP) system with a capacitively biased electrode is investigated using space and phase resolved optical emission spectroscopy. The two power source frequencies are exact multiple of each other and phase-locked. In this configuration, the system is investigated when the coil is operated in both E-mode and H-mode. The results show that in a phase synchronized RF biased ICP, the electrode bias power couples with the capacitive contribution of the coil, in both E-mode and H-modes, similar to dual-frequency capacitively coupled plasmas (2f-CCPs). It is also demonstrated that in H-mode, the phase between the electrode bias frequency and the ICP coil frequency influences the electron heating, similar to the electrical asymmetry effect in 2f-CCPs.
Original language | English |
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Article number | 044007 |
Number of pages | 9 |
Journal | Plasma Sources Science and Technology |
Volume | 24 |
Issue number | 4 |
Early online date | 15 Jul 2015 |
DOIs | |
Publication status | Published - Aug 2015 |
Keywords
- inductively coupled plasma
- plasma diagnostics
- RF biased ICP
- space and phase resolved optical emission spectroscopy (PROES)
ASJC Scopus subject areas
- Condensed Matter Physics