Energy analysis of hyperthermal hydrogen atoms generated through surface neutralisation of ions

T. Babkina, Timo Gans, U. Czarnetzki

Research output: Contribution to journalArticle

28 Citations (Scopus)

Abstract

Hydrogen ions (H+, H-2(+) and H-3(+)) are produced in a magnetically confined inductively coupled radio frequency plasma. Ions are accelerated in the plasma boundary sheath potential, of several hundred volts, in front of a biased metal electrode immersed in the plasma. Backscattered hyperthermal hydrogen atoms are investigated by optical emission spectroscopy and an energy-resolved mass spectrometer. Ionisation of fast neutrals through electron stripping of atoms in the plasma allows energy analysis of the resulting ions. Thereby, the energy distribution function of the hyperthermal atoms can be deduced. The energy spectra can be explained as a superposition of individual spectra of the various ion species. The measured spectra also shows contributions of negative ions created at the electrode surface. In addition to experimental measurements, simulations of the neutral flux of backscattered atoms are carried out.
Original languageEnglish
Pages (from-to)235-241
Number of pages7
JournalEurophysics Letters (EPL)
Volume72 (2)
Issue number2
DOIs
Publication statusPublished - 15 Oct 2005

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hydrogen atoms
ions
atoms
electrodes
energy
optical emission spectroscopy
hydrogen ions
stripping
sheaths
negative ions
mass spectrometers
radio frequencies
energy distribution
energy spectra
distribution functions
ionization
metals
electrons
simulation

Cite this

Babkina, T. ; Gans, Timo ; Czarnetzki, U. / Energy analysis of hyperthermal hydrogen atoms generated through surface neutralisation of ions. In: Europhysics Letters (EPL). 2005 ; Vol. 72 (2), No. 2. pp. 235-241.
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Energy analysis of hyperthermal hydrogen atoms generated through surface neutralisation of ions. / Babkina, T.; Gans, Timo; Czarnetzki, U.

In: Europhysics Letters (EPL), Vol. 72 (2), No. 2, 15.10.2005, p. 235-241.

Research output: Contribution to journalArticle

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