Enhancing the performance of sintered fused silica cylindrical shell resonators through wet etching

Yahya Atwa, Hamza Shakeel

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Abstract

This study presents the fabrication, characterization and testing of cylindrical shell resonators (CSRs) manufactured using a printable polymer-glass mixture (GlassomerTM) and replication molding. We first manufactured three 9.6 mm-diameter fused silica-based CSRs with a thickness of 0.6mm. After performing wet etching of fully sintered glass devices, the shell thickness of each resonator was reduced to ~0.3mm. For one of the etched devices, we observed between three to four times improvements in quality factor, approximately seven times increase in time constant values, and two to eight times reduction in frequency split for N=2 and N=3 resonance modes. Moreover, the enhancement of surface roughness (~340 nm to ~156 nm) and reduction in shell thickness show a direct relationship with improvements in device performance.
Original languageEnglish
Number of pages4
JournalIEEE Sensors Letters
Volume8
Issue number12
Early online date02 Dec 2024
DOIs
Publication statusEarly online date - 02 Dec 2024

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This work is licensed under Queen’s Research Publications and Copyright Policy.

Keywords

  • sintered fused silica cylindrical shell resonators
  • shell resonators
  • wet etching
  • replication molding

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