Projects per year
Abstract
This study presents the fabrication, characterization and testing of cylindrical shell resonators (CSRs) manufactured using a printable polymer-glass mixture (GlassomerTM) and replication molding. We first manufactured three 9.6 mm-diameter fused silica-based CSRs with a thickness of 0.6mm. After performing wet etching of fully sintered glass devices, the shell thickness of each resonator was reduced to ~0.3mm. For one of the etched devices, we observed between three to four times improvements in quality factor, approximately seven times increase in time constant values, and two to eight times reduction in frequency split for N=2 and N=3 resonance modes. Moreover, the enhancement of surface roughness (~340 nm to ~156 nm) and reduction in shell thickness show a direct relationship with improvements in device performance.
Original language | English |
---|---|
Number of pages | 4 |
Journal | IEEE Sensors Letters |
Volume | 8 |
Issue number | 12 |
Early online date | 02 Dec 2024 |
DOIs | |
Publication status | Early online date - 02 Dec 2024 |
Publications and Copyright Policy
This work is licensed under Queen’s Research Publications and Copyright Policy.Keywords
- sintered fused silica cylindrical shell resonators
- shell resonators
- wet etching
- replication molding
Fingerprint
Dive into the research topics of 'Enhancing the performance of sintered fused silica cylindrical shell resonators through wet etching'. Together they form a unique fingerprint.Projects
- 2 Active
-
R1820ECS: Queen's University Belfast Core Equipment Call 2022
Johnson, C. (PI), Shakeel, H. (CoI) & Woods, R. (CoI)
11/01/2023 → …
Project: Research
-
R1508ECS: In-situ Mass and Elasticity Monitoring Sensors (iMEMS) for Characterization of Thin Films at High Temperature
Shakeel, H. (PI)
06/01/2021 → …
Project: Research
Activities
- 1 Invited talk
-
Academic Keynote: In-situ Monitoring of mechanical properties of thin films at High Temperature
Shakeel, H. (Advisor)
13 Dec 2024Activity: Talk or presentation types › Invited talk
Student theses
-
Future glass factory: precision shaping of glass using amorphous silica nanocomposite prepolymer and replication molding
Atwa, Y. A. (Author), Shakeel, H. (Supervisor) & McNeill, D. (Supervisor), Jul 2025Student thesis: Doctoral Thesis › Doctor of Philosophy
File
-
First demonstration of a printable fused-silica glass based milli-meter sized resonator
Atwa, Y. & Shakeel, H., 07 May 2024, Proceedings of the 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023. Institute of Electrical and Electronics Engineers Inc., p. 1583-1586 4 p. (TRANSDUCERS Proceedings).Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
-
Manufacturing fused silica hemispherical resonators using polymer glass suspension and replication molding
Atwa, Y. & Shakeel, H., Aug 2024, In: Journal of Micromechanics and Microengineering. 34, 8, 11 p., 085005.Research output: Contribution to journal › Article › peer-review
Open AccessFile1 Citation (Scopus)16 Downloads (Pure) -
Manufacture of hemi-spherical resonators using printable fused silica glass
Atwa, Y. & Shakeel, H., 25 Apr 2023, Proceedings of the 10th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2023. Institute of Electrical and Electronics Engineers Inc., 4 p. (International Symposium on Inertial Sensors and Systems (ISISS): Proceedings).Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
Open AccessFile2 Citations (Scopus)123 Downloads (Pure)