Experimental studies of rf sheaths

Bill Graham, C.M.O. Mahony

Research output: Contribution to conferencePaper

Original languageEnglish
Pages503-510
Number of pages8
Publication statusPublished - May 1998
EventNATO Advanced Research Workshop on Electron Kinetics and Applications of Glow Discharges - St Petersburg, Russian Federation
Duration: 01 May 199801 May 1998

Conference

ConferenceNATO Advanced Research Workshop on Electron Kinetics and Applications of Glow Discharges
CountryRussian Federation
CitySt Petersburg
Period01/05/199801/05/1998

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