External circuit system effects on chlorine plasma instabilities

A.R. Ellingboe; V.J. Law; E. Soberon; F. Garcia; William Graham

doi:10.1049/el:20050424

External circuit system effects on chlorine plasma instabilities

A.R. Ellingboe, V.J. Law, E. Soberon, F. Garcia, William Graham

Research output: Contribution to journal › Article › peer-review

4 Citations (Scopus)

Abstract

The effects of the external circuit on plasma instabilities in all inductive plasma source are investigated. The instabilities are found to be asymmetric with respect to the circuit input impedance. A simplified model of the antenna-plasnia coupling provides an explanation of the asymetry.

Original language	English
Pages (from-to)	525-526
Number of pages	2
Journal	Electronics Letters
Volume	41
Issue number	9
DOIs	https://doi.org/10.1049/el:20050424
Publication status	Published - 28 Apr 2005

ASJC Scopus subject areas

Electrical and Electronic Engineering

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title = "External circuit system effects on chlorine plasma instabilities",

abstract = "The effects of the external circuit on plasma instabilities in all inductive plasma source are investigated. The instabilities are found to be asymmetric with respect to the circuit input impedance. A simplified model of the antenna-plasnia coupling provides an explanation of the asymetry.",

author = "A.R. Ellingboe and V.J. Law and E. Soberon and F. Garcia and William Graham",

year = "2005",

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doi = "10.1049/el:20050424",

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journal = "Electronics Letters",

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T1 - External circuit system effects on chlorine plasma instabilities

AU - Ellingboe, A.R.

AU - Law, V.J.

AU - Soberon, E.

AU - Garcia, F.

AU - Graham, William

PY - 2005/4/28

Y1 - 2005/4/28

N2 - The effects of the external circuit on plasma instabilities in all inductive plasma source are investigated. The instabilities are found to be asymmetric with respect to the circuit input impedance. A simplified model of the antenna-plasnia coupling provides an explanation of the asymetry.

AB - The effects of the external circuit on plasma instabilities in all inductive plasma source are investigated. The instabilities are found to be asymmetric with respect to the circuit input impedance. A simplified model of the antenna-plasnia coupling provides an explanation of the asymetry.

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U2 - 10.1049/el:20050424

DO - 10.1049/el:20050424

M3 - Article

SN - 0013-5194

VL - 41

SP - 525

EP - 526

JO - Electronics Letters

JF - Electronics Letters

IS - 9

ER -

External circuit system effects on chlorine plasma instabilities

Abstract

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