External circuit system effects on chlorine plasma instabilities

A.R. Ellingboe, V.J. Law, E. Soberon, F. Garcia, William Graham

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

The effects of the external circuit on plasma instabilities in all inductive plasma source are investigated. The instabilities are found to be asymmetric with respect to the circuit input impedance. A simplified model of the antenna-plasnia coupling provides an explanation of the asymetry.
Original languageEnglish
Pages (from-to)525-526
Number of pages2
JournalElectronics Letters
Volume41
Issue number9
DOIs
Publication statusPublished - 28 Apr 2005

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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