Fabrication and characterisation of silicon on insulator substrates incorporating thermal vias

Michael Bain, Paul Baine, David McNeill, Gopalan Srinivasan, N. Jankovic, J. McCartney, R.A. Moore, Mervyn Armstrong, Harold Gamble

Research output: Contribution to conferencePaper

Original languageEnglish
Pages103-108
Number of pages6
Publication statusPublished - Apr 2005
EventNATO Advanced Research Workshop: Science and Technology of Semiconductor-On-Insulator structures devices operating in a harsh environment - Kyiv, Ukraine
Duration: 01 Apr 200401 Apr 2004

Conference

ConferenceNATO Advanced Research Workshop: Science and Technology of Semiconductor-On-Insulator structures devices operating in a harsh environment
CountryUkraine
CityKyiv
Period01/04/200401/04/2004

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