Fabrication and characterisation of silicon on insulator substrates incorporating thermal vias

Michael Bain; Paul Baine; David McNeill; Gopalan Srinivasan; N. Jankovic; J. McCartney; R.A. Moore; Mervyn Armstrong; Harold Gamble

Fabrication and characterisation of silicon on insulator substrates incorporating thermal vias

Michael Bain
, Paul Baine
, David McNeill
, Gopalan Srinivasan
, N. Jankovic
, J. McCartney
, R.A. Moore
, Mervyn Armstrong
, Harold Gamble

Research output: Contribution to conference › Paper

Original language	English
Pages	103-108
Number of pages	6
Publication status	Published - Apr 2005
Event	NATO Advanced Research Workshop: Science and Technology of Semiconductor-On-Insulator structures devices operating in a harsh environment - Kyiv, Ukraine Duration: 01 Apr 2004 → 01 Apr 2004

Conference

Conference	NATO Advanced Research Workshop: Science and Technology of Semiconductor-On-Insulator structures devices operating in a harsh environment
Country/Territory	Ukraine
City	Kyiv
Period	01/04/2004 → 01/04/2004

Cite this

Bain, M., Baine, P., McNeill, D., Srinivasan, G., Jankovic, N., McCartney, J., Moore, R. A., Armstrong, M., & Gamble, H. (2005). Fabrication and characterisation of silicon on insulator substrates incorporating thermal vias. 103-108. Paper presented at NATO Advanced Research Workshop: Science and Technology of Semiconductor-On-Insulator structures devices operating in a harsh environment, Kyiv, Ukraine.

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title = "Fabrication and characterisation of silicon on insulator substrates incorporating thermal vias",

author = "Michael Bain and Paul Baine and David McNeill and Gopalan Srinivasan and N. Jankovic and J. McCartney and R.A. Moore and Mervyn Armstrong and Harold Gamble",

year = "2005",

month = apr,

language = "English",

pages = "103--108",

note = "NATO Advanced Research Workshop: Science and Technology of Semiconductor-On-Insulator structures devices operating in a harsh environment ; Conference date: 01-04-2004 Through 01-04-2004",

}

Bain, M, Baine, P, McNeill, D, Srinivasan, G, Jankovic, N, McCartney, J, Moore, RA, Armstrong, M & Gamble, H 2005, 'Fabrication and characterisation of silicon on insulator substrates incorporating thermal vias', Paper presented at NATO Advanced Research Workshop: Science and Technology of Semiconductor-On-Insulator structures devices operating in a harsh environment, Kyiv, Ukraine, 01/04/2004 - 01/04/2004 pp. 103-108.

Fabrication and characterisation of silicon on insulator substrates incorporating thermal vias. / Bain, Michael; Baine, Paul; McNeill, David et al.
2005. 103-108 Paper presented at NATO Advanced Research Workshop: Science and Technology of Semiconductor-On-Insulator structures devices operating in a harsh environment, Kyiv, Ukraine.

Research output: Contribution to conference › Paper

TY - CONF

T1 - Fabrication and characterisation of silicon on insulator substrates incorporating thermal vias

AU - Bain, Michael

AU - Baine, Paul

AU - McNeill, David

AU - Srinivasan, Gopalan

AU - Jankovic, N.

AU - McCartney, J.

AU - Moore, R.A.

AU - Armstrong, Mervyn

AU - Gamble, Harold

PY - 2005/4

Y1 - 2005/4

M3 - Paper

SP - 103

EP - 108

T2 - NATO Advanced Research Workshop: Science and Technology of Semiconductor-On-Insulator structures devices operating in a harsh environment

Y2 - 1 April 2004 through 1 April 2004

ER -