@conference{8bd6dcaae6e2421ba20a24621e4b1b59,
title = "Fabrication of SOI substrates with buried tungsten silicide layer by smart-cut technique",
author = "Suli Suder and Richard Hurley and Michael Bain and Paul Baine and David McNeill and Mervyn Armstrong and Harold Gamble",
year = "2001",
month = sep,
language = "English",
pages = "279--282",
note = "Proceedings of 9th International Symposium on Integrated Circuits, Devices & Systems, ISIC-2001 ; Conference date: 01-09-2001 Through 01-09-2001",
}