Fabrication of sub-micron trenches by E-Beam lithography and deep reactive ion etching

Research output: Contribution to conference › Paper

Original language	English
Pages	0-0
Number of pages	1
Publication status	Published - Sept 2005
Event	Microscopical Society of Ireland, 29 th Annual Symp - Dublin, Ireland Duration: 01 Sept 2005 → 01 Sept 2005

Conference	Microscopical Society of Ireland, 29 th Annual Symp
Country/Territory	Ireland
City	Dublin
Period	01/09/2005 → 01/09/2005

Cite this

@conference{a21e224d301442dca344c30f1548fc5a,

title = "Fabrication of sub-micron trenches by E-Beam lithography and deep reactive ion etching",

author = "Daniel Bien and Viji Srigengan and Neil Mitchell and Harold Gamble",

year = "2005",

month = sep,

language = "English",

pages = "0--0",

note = "Microscopical Society of Ireland, 29 th Annual Symp ; Conference date: 01-09-2005 Through 01-09-2005",

}