First demonstration of a printable fused-silica glass based milli-meter sized resonator

Yahya Atwa, Hamza Shakeel*

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper describes a new manufacturing method for producing a double paddle oscillator geometry made of fused silica. The method involves casting a printable glass suspension into a polymer mould, followed by thermal processing steps. Our fabrication method is easy to use, highly reliable, requires fewer manufacturing steps, and enables batch-fabrication of fused silica devices. We can experimentally detect two cantilever-type resonance modes at 634 Hz and 3.2 kHz with quality factors of 2 × 10 3 and 1.6 × 10 3 respectively. Additionally, our optimized fabrication method is extremely robust and guarantees a device yield of over 90%. All manufacturing steps involved in our technique can be performed outside of a cleanroom facility.

Original languageEnglish
Title of host publicationProceedings of the 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1583-1586
Number of pages4
ISBN (Electronic)9784886864352
ISBN (Print)9798350333022
Publication statusPublished - 07 May 2024
Event22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023 - Kyoto, Japan
Duration: 25 Jun 202329 Jun 2023

Publication series

NameTRANSDUCERS Proceedings
ISSN (Print)2167-0013
ISSN (Electronic)2167-0021

Conference

Conference22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023
Country/TerritoryJapan
CityKyoto
Period25/06/202329/06/2023

Keywords

  • 3D printing
  • Double paddle oscillator
  • fused silica
  • printable glass

ASJC Scopus subject areas

  • Computer Science Applications
  • Electrical and Electronic Engineering
  • Control and Optimization
  • Instrumentation

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