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Abstract
This paper describes a new manufacturing method for producing a double paddle oscillator geometry made of fused silica. The method involves casting a printable glass suspension into a polymer mould, followed by thermal processing steps. Our fabrication method is easy to use, highly reliable, requires fewer manufacturing steps, and enables batch-fabrication of fused silica devices. We can experimentally detect two cantilever-type resonance modes at 634 Hz and 3.2 kHz with quality factors of 2 × 10 3 and 1.6 × 10 3 respectively. Additionally, our optimized fabrication method is extremely robust and guarantees a device yield of over 90%. All manufacturing steps involved in our technique can be performed outside of a cleanroom facility.
Original language | English |
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Title of host publication | Proceedings of the 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023 |
Publisher | Institute of Electrical and Electronics Engineers Inc. |
Pages | 1583-1586 |
Number of pages | 4 |
ISBN (Electronic) | 9784886864352 |
ISBN (Print) | 9798350333022 |
Publication status | Published - 07 May 2024 |
Event | 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023 - Kyoto, Japan Duration: 25 Jun 2023 → 29 Jun 2023 |
Publication series
Name | TRANSDUCERS Proceedings |
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ISSN (Print) | 2167-0013 |
ISSN (Electronic) | 2167-0021 |
Conference
Conference | 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023 |
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Country/Territory | Japan |
City | Kyoto |
Period | 25/06/2023 → 29/06/2023 |
Keywords
- 3D printing
- Double paddle oscillator
- fused silica
- printable glass
ASJC Scopus subject areas
- Computer Science Applications
- Electrical and Electronic Engineering
- Control and Optimization
- Instrumentation
Fingerprint
Dive into the research topics of 'First demonstration of a printable fused-silica glass based milli-meter sized resonator'. Together they form a unique fingerprint.Projects
- 1 Active
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R1508ECS: In-situ Mass and Elasticity Monitoring Sensors (iMEMS) for Characterization of Thin Films at High Temperature
Shakeel, H. (PI)
06/01/2021 → …
Project: Research
Student theses
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Future glass factory: precision shaping of glass using amorphous silica nanocomposite prepolymer and replication molding
Atwa, Y. A. (Author), Shakeel, H. (Supervisor) & McNeill, D. (Supervisor), Jul 2025Student thesis: Doctoral Thesis › Doctor of Philosophy
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Research output
- 1 Article
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Enhancing the performance of sintered fused silica cylindrical shell resonators through wet etching
Atwa, Y. & Shakeel, H., 02 Dec 2024, (Early online date) In: IEEE Sensors Letters. 8, 12, 4 p.Research output: Contribution to journal › Article › peer-review
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