First demonstration of a printable fused-silica glass based milli-meter sized resonator

This paper describes a new manufacturing method for producing a double paddle oscillator geometry made of fused silica. The method involves casting a printable glass suspension into a polymer mould, followed by thermal processing steps. Our fabrication method is easy to use, highly reliable, requires fewer manufacturing steps, and enables batch-fabrication of fused silica devices. We can experimentally detect two cantilever-type resonance modes at 634 Hz and 3.2 kHz with quality factors of 2 × 10 ³ and 1.6 × 10 ³ respectively. Additionally, our optimized fabrication method is extremely robust and guarantees a device yield of over 90%. All manufacturing steps involved in our technique can be performed outside of a cleanroom facility.