First reconfigurable MEMS separation columns for micro gas chromatography, 25th IEEE International Conference on Micro Electro Mechanical Systems (MEMS).

We present herein for the first time reconfigurable chromatographic separation columns by merging MEMS and nanotechnology using self-assembly of thiol compounds on an electrodeposited gold surface in MEMS columns. This coupling provides: (1) the ability to fabricate both polar and non-polar stationary phases, affording the separation of gas mixtures with a wide range of boiling points and polarities; and (2) the ability to reconfigure the separation characteristics by removing the stationary phase and functionalizing it with another thiol. MEMS columns were produced to provide 250μm-deep, 30μm-wide, 25cm-long, 16-channel mutlicapillary columns (μMCC) using a double-doped silicon-on-glass fabrication process. Multi-compound separations were achieved with separation efficiencies of 7200 plates/m. The method enables realization of highly reproducible, easy-to-coat, and reusable μGC separation columns, thus saving resources, time, and cost.