Fluence dependence of the surface roughness of InP after N2 + bombardment

Johan B. Malherbe*, N. G. Van Der Berg, F. Claudel, S. O S Osman, R. Q. Odendaal, F. Krok, M. Szymonski

*Corresponding author for this work

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

InP(1 0 0) surfaces were sputtered under ultrahigh vacuum conditions by 5 keV N2+ ions at an angle of incidence of 41° to the sample normal. The fluence, φ, used in this study, varied from 1 × 1014 to 5 × 1018 N2+ cm-2. The surface topography was investigated using field emission scanning electron microscopy (FE-SEM) and atomic force microscopy (AFM). At the lower fluences (φ ≤ 5 × 1016 N2+ cm-2) only conelike features appeared, similar in shape as was found for noble gas ion bombardment of InP. At the higher fluences, ripples also appeared on the surface. The bombardment-induced topography was quantified using the rms roughness. This parameter showed a linear relationship with the logarithm of the fluence. A model is presented to explain this relationship. The ripple wavelength was also determined using a Fourier transform method. These measurements as a function of fluence do not agree with the predictions of the Bradley-Harper theory.

Original languageEnglish
Pages (from-to)533-538
Number of pages6
JournalNuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Volume230
Issue number1-4
DOIs
Publication statusPublished - 01 Apr 2005

Keywords

  • AFM
  • Bombardment-induced ripples
  • Indium phosphide
  • InP
  • Ion bombardment
  • Nano-technology
  • Nitrogen bombardment
  • Sputter cones
  • Surface morphology
  • Topography

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Instrumentation
  • Surfaces and Interfaces

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