Fluence dependence of the surface roughness of InP after N2 + bombardment

Johan B. Malherbe; N. G. Van Der Berg; F. Claudel; S. O S Osman; R. Q. Odendaal; F. Krok; M. Szymonski

doi:10.1016/j.nimb.2004.12.096

Fluence dependence of the surface roughness of InP after N₂ ⁺ bombardment

Johan B. Malherbe^*, N. G. Van Der Berg, F. Claudel, S. O S Osman, R. Q. Odendaal, F. Krok, M. Szymonski

^*Corresponding author for this work

School of Medicine, Dentistry and Biomedical Sciences

Research output: Contribution to journal › Article › peer-review

3 Citations (Scopus)

Abstract

InP(1 0 0) surfaces were sputtered under ultrahigh vacuum conditions by 5 keV N2+ ions at an angle of incidence of 41° to the sample normal. The fluence, φ, used in this study, varied from 1 × 10¹⁴ to 5 × 10¹⁸ N2+ cm^-2. The surface topography was investigated using field emission scanning electron microscopy (FE-SEM) and atomic force microscopy (AFM). At the lower fluences (φ ≤ 5 × 10¹⁶ N2+ cm^-2) only conelike features appeared, similar in shape as was found for noble gas ion bombardment of InP. At the higher fluences, ripples also appeared on the surface. The bombardment-induced topography was quantified using the rms roughness. This parameter showed a linear relationship with the logarithm of the fluence. A model is presented to explain this relationship. The ripple wavelength was also determined using a Fourier transform method. These measurements as a function of fluence do not agree with the predictions of the Bradley-Harper theory.

Original language	English
Pages (from-to)	533-538
Number of pages	6
Journal	Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Volume	230
Issue number	1-4
DOIs	https://doi.org/10.1016/j.nimb.2004.12.096
Publication status	Published - 01 Apr 2005

Keywords

AFM
Bombardment-induced ripples
Indium phosphide
InP
Ion bombardment
Nano-technology
Nitrogen bombardment
Sputter cones
Surface morphology
Topography

ASJC Scopus subject areas

Surfaces, Coatings and Films
Instrumentation
Surfaces and Interfaces

Access to Document

10.1016/j.nimb.2004.12.096

Cite this

@article{dd4ed7a11c4b48f1a30dc4445152cf27,

title = "Fluence dependence of the surface roughness of InP after N2 + bombardment",

abstract = "InP(1 0 0) surfaces were sputtered under ultrahigh vacuum conditions by 5 keV N2+ ions at an angle of incidence of 41° to the sample normal. The fluence, φ, used in this study, varied from 1 × 1014 to 5 × 1018 N2+ cm-2. The surface topography was investigated using field emission scanning electron microscopy (FE-SEM) and atomic force microscopy (AFM). At the lower fluences (φ ≤ 5 × 1016 N2+ cm-2) only conelike features appeared, similar in shape as was found for noble gas ion bombardment of InP. At the higher fluences, ripples also appeared on the surface. The bombardment-induced topography was quantified using the rms roughness. This parameter showed a linear relationship with the logarithm of the fluence. A model is presented to explain this relationship. The ripple wavelength was also determined using a Fourier transform method. These measurements as a function of fluence do not agree with the predictions of the Bradley-Harper theory.",

keywords = "AFM, Bombardment-induced ripples, Indium phosphide, InP, Ion bombardment, Nano-technology, Nitrogen bombardment, Sputter cones, Surface morphology, Topography",

author = "Malherbe, {Johan B.} and {Van Der Berg}, {N. G.} and F. Claudel and Osman, {S. O S} and Odendaal, {R. Q.} and F. Krok and M. Szymonski",

year = "2005",

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doi = "10.1016/j.nimb.2004.12.096",

language = "English",

volume = "230",

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journal = "Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms",

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TY - JOUR

T1 - Fluence dependence of the surface roughness of InP after N2 + bombardment

AU - Malherbe, Johan B.

AU - Van Der Berg, N. G.

AU - Claudel, F.

AU - Osman, S. O S

AU - Odendaal, R. Q.

AU - Krok, F.

AU - Szymonski, M.

PY - 2005/4/1

Y1 - 2005/4/1

N2 - InP(1 0 0) surfaces were sputtered under ultrahigh vacuum conditions by 5 keV N2+ ions at an angle of incidence of 41° to the sample normal. The fluence, φ, used in this study, varied from 1 × 1014 to 5 × 1018 N2+ cm-2. The surface topography was investigated using field emission scanning electron microscopy (FE-SEM) and atomic force microscopy (AFM). At the lower fluences (φ ≤ 5 × 1016 N2+ cm-2) only conelike features appeared, similar in shape as was found for noble gas ion bombardment of InP. At the higher fluences, ripples also appeared on the surface. The bombardment-induced topography was quantified using the rms roughness. This parameter showed a linear relationship with the logarithm of the fluence. A model is presented to explain this relationship. The ripple wavelength was also determined using a Fourier transform method. These measurements as a function of fluence do not agree with the predictions of the Bradley-Harper theory.

AB - InP(1 0 0) surfaces were sputtered under ultrahigh vacuum conditions by 5 keV N2+ ions at an angle of incidence of 41° to the sample normal. The fluence, φ, used in this study, varied from 1 × 1014 to 5 × 1018 N2+ cm-2. The surface topography was investigated using field emission scanning electron microscopy (FE-SEM) and atomic force microscopy (AFM). At the lower fluences (φ ≤ 5 × 1016 N2+ cm-2) only conelike features appeared, similar in shape as was found for noble gas ion bombardment of InP. At the higher fluences, ripples also appeared on the surface. The bombardment-induced topography was quantified using the rms roughness. This parameter showed a linear relationship with the logarithm of the fluence. A model is presented to explain this relationship. The ripple wavelength was also determined using a Fourier transform method. These measurements as a function of fluence do not agree with the predictions of the Bradley-Harper theory.

KW - AFM

KW - Bombardment-induced ripples

KW - Indium phosphide

KW - InP

KW - Ion bombardment

KW - Nano-technology

KW - Nitrogen bombardment

KW - Sputter cones

KW - Surface morphology

KW - Topography

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