Fragmentation of metastable SF6-* ions formed in low energy electron attachment to SF6has been investigated. The dissociation reaction SF6-*?SF5-+F has been observed ~ 1.5–3.4 µs and ~ 17–32 µs after electron attachment in a time-of-flight and a double focusing two sector field mass spectrometer, respectively. Metastable dissociation is observed with maximum intensity at ~ 0.3 eV between the SF6-* peak at zero and theSF5- peak at ~ 0.4 eV. The kinetic energy released in dissociation is low, with a most probable value of 18 meV. The lifetime of SF6-* decreases as the electron energy increases, but it is not possible to fit this decrease with statistical Rice–Ramsperger–Kassel/quasiequilibrium theory. Metastable dissociation of SF6-* appears to compete with autodetachment of the electron at all electron energies.