Germanium Processing

Harold Gamble, Mervyn Armstrong, Paul Baine, Y.H. Low, P.V. Rainey, Neil Mitchell, David McNeill

Research output: Chapter in Book/Report/Conference proceeding › Chapter

Original language	English
Title of host publication	Semiconductor-On-Insulator Materials for Nanoelectronics Applications
Editors	Colinge Nazarov, Balestra, Raskin, Gamiz, Lysenko
Publisher	Springer
Pages	3-29
Number of pages	27
ISBN (Print)	978-3642158674
Publication status	Published - Feb 2011

Chapter Number: 1

Cite this

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title = "Germanium Processing",

author = "Harold Gamble and Mervyn Armstrong and Paul Baine and Y.H. Low and P.V. Rainey and Neil Mitchell and David McNeill",

note = "Chapter Number: 1",

year = "2011",

month = feb,

language = "English",

isbn = "978-3642158674",

pages = "3--29",

editor = "Colinge Nazarov and Balestra and Raskin and Gamiz and Lysenko",

booktitle = "Semiconductor-On-Insulator Materials for Nanoelectronics Applications",

publisher = "Springer",

}

TY - CHAP

T1 - Germanium Processing

AU - Gamble, Harold

AU - Armstrong, Mervyn

AU - Baine, Paul

AU - Low, Y.H.

AU - Rainey, P.V.

AU - Mitchell, Neil

AU - McNeill, David

N1 - Chapter Number: 1

PY - 2011/2

Y1 - 2011/2

M3 - Chapter

SN - 978-3642158674

SP - 3

EP - 29

BT - Semiconductor-On-Insulator Materials for Nanoelectronics Applications

A2 - Nazarov, Colinge

A2 - Balestra, null

A2 - Raskin, null

A2 - Gamiz, null

A2 - Lysenko, null

PB - Springer

ER -