Growth of multi-layer Si/Si1-xGex structures using rapid thermal chemical vapour deposition

Research output: Contribution to conferencePaper

Original languageEnglish
Pages187-192
Number of pages6
Publication statusPublished - Dec 1993
EventMRS Symposium Proceedings - Boston, United States
Duration: 01 Dec 199301 Dec 1993

Conference

ConferenceMRS Symposium Proceedings
Country/TerritoryUnited States
CityBoston
Period01/12/199301/12/1993

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