Growth of wide band gap polycrystalline semi-insulating polycrystalline silicon

D. Sands, K.M. Brunson, D.M. Spink, C.B. Thomas, David McNeill, A.A. McDonald, S. Jennings, P.J. Rosser

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)16-20
Number of pages5
JournalJournal of Vacuum Science & Technology B (microelectronics Processing & Phenomena)
Volume8(1)
Publication statusPublished - Feb 1990

Cite this

Sands, D., Brunson, K. M., Spink, D. M., Thomas, C. B., McNeill, D., McDonald, A. A., Jennings, S., & Rosser, P. J. (1990). Growth of wide band gap polycrystalline semi-insulating polycrystalline silicon. Journal of Vacuum Science & Technology B (microelectronics Processing & Phenomena), 8(1), 16-20.