Growth of wide band gap polycrystalline semi-insulating polycrystalline silicon

D. Sands, K.M. Brunson, D.M. Spink, C.B. Thomas, David McNeill, A.A. McDonald, S. Jennings, P.J. Rosser

Research output: Contribution to journalArticle

LanguageEnglish
Pages16-20
Number of pages5
JournalJournal of Vacuum Science & Technology B (microelectronics Processing & Phenomena)
Volume8(1)
Publication statusPublished - Feb 1990

Cite this

Sands, D., Brunson, K. M., Spink, D. M., Thomas, C. B., McNeill, D., McDonald, A. A., ... Rosser, P. J. (1990). Growth of wide band gap polycrystalline semi-insulating polycrystalline silicon. Journal of Vacuum Science & Technology B (microelectronics Processing & Phenomena), 8(1), 16-20.
Sands, D. ; Brunson, K.M. ; Spink, D.M. ; Thomas, C.B. ; McNeill, David ; McDonald, A.A. ; Jennings, S. ; Rosser, P.J. / Growth of wide band gap polycrystalline semi-insulating polycrystalline silicon. In: Journal of Vacuum Science & Technology B (microelectronics Processing & Phenomena). 1990 ; Vol. 8(1). pp. 16-20.
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Sands, D, Brunson, KM, Spink, DM, Thomas, CB, McNeill, D, McDonald, AA, Jennings, S & Rosser, PJ 1990, 'Growth of wide band gap polycrystalline semi-insulating polycrystalline silicon', Journal of Vacuum Science & Technology B (microelectronics Processing & Phenomena), vol. 8(1), pp. 16-20.

Growth of wide band gap polycrystalline semi-insulating polycrystalline silicon. / Sands, D.; Brunson, K.M.; Spink, D.M.; Thomas, C.B.; McNeill, David; McDonald, A.A.; Jennings, S.; Rosser, P.J.

In: Journal of Vacuum Science & Technology B (microelectronics Processing & Phenomena), Vol. 8(1), 02.1990, p. 16-20.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Growth of wide band gap polycrystalline semi-insulating polycrystalline silicon

AU - Sands, D.

AU - Brunson, K.M.

AU - Spink, D.M.

AU - Thomas, C.B.

AU - McNeill, David

AU - McDonald, A.A.

AU - Jennings, S.

AU - Rosser, P.J.

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JF - Journal of Vacuum Science & Technology B (microelectronics Processing & Phenomena)

SN - 0734-211X

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