Growth of wide band gap polycrystalline semi-insulating polycrystalline silicon

D. Sands, K.M. Brunson, D.M. Spink, C.B. Thomas, David McNeill, A.A. McDonald, S. Jennings, P.J. Rosser

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)16-20
Number of pages5
JournalJournal of Vacuum Science & Technology B (microelectronics Processing & Phenomena)
Publication statusPublished - Feb 1990

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