Heating modes in capacitively coupled RF plasmas observed with emission spectroscopy

C.M.O. Mahony; Bill Graham

Heating modes in capacitively coupled RF plasmas observed with emission spectroscopy

Research output: Contribution to journal › Article › peer-review

Abstract

It is demonstrated that spatio-temporally resolved emission studies of a capacitively coupled gaseous electronics conference reference cell discharge can be used to determine changes in the heating mechanisms in such discharges.

Original language	English
Pages (from-to)	72-73
Number of pages	2
Journal	IEEE Transactions on Plasma Science
Volume	27
Issue number	1
Publication status	Published - 1999

ASJC Scopus subject areas

Physics and Astronomy(all)
Condensed Matter Physics

Fingerprint Dive into the research topics of 'Heating modes in capacitively coupled RF plasmas observed with emission spectroscopy'. Together they form a unique fingerprint.

Cite this

@article{b8799c39a58c4430af866e72e14408d7,

title = "Heating modes in capacitively coupled RF plasmas observed with emission spectroscopy",

abstract = "It is demonstrated that spatio-temporally resolved emission studies of a capacitively coupled gaseous electronics conference reference cell discharge can be used to determine changes in the heating mechanisms in such discharges.",

author = "C.M.O. Mahony and Bill Graham",

year = "1999",

language = "English",

volume = "27",

pages = "72--73",

journal = "IEEE Transactions on Plasma Science",

issn = "0093-3813",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

number = "1",

}

TY - JOUR

T1 - Heating modes in capacitively coupled RF plasmas observed with emission spectroscopy

AU - Mahony, C.M.O.

AU - Graham, Bill

PY - 1999

Y1 - 1999

N2 - It is demonstrated that spatio-temporally resolved emission studies of a capacitively coupled gaseous electronics conference reference cell discharge can be used to determine changes in the heating mechanisms in such discharges.

AB - It is demonstrated that spatio-temporally resolved emission studies of a capacitively coupled gaseous electronics conference reference cell discharge can be used to determine changes in the heating mechanisms in such discharges.

M3 - Article

VL - 27

SP - 72

EP - 73

JO - IEEE Transactions on Plasma Science

JF - IEEE Transactions on Plasma Science

SN - 0093-3813

IS - 1

ER -