Heating modes in capacitively coupled RF plasmas observed with emission spectroscopy

C.M.O. Mahony, Bill Graham

Research output: Contribution to journalArticlepeer-review

19 Citations (Scopus)

Abstract

It is demonstrated that spatio-temporally resolved emission studies of a capacitively coupled gaseous electronics conference reference cell discharge can be used to determine changes in the heating mechanisms in such discharges.
Original languageEnglish
Pages (from-to)72-73
Number of pages2
JournalIEEE Transactions on Plasma Science
Volume27
Issue number1
Publication statusPublished - 1999

ASJC Scopus subject areas

  • Physics and Astronomy(all)
  • Condensed Matter Physics

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