Heating regimes observed in capacitive RF driven discharges

C.M.O. Mahony, Philip Steen, J. McFarland, William Graham

Research output: Contribution to conferencePaper

Original languageEnglish
Pages25-26
Number of pages2
Publication statusPublished - Jul 1999
Event24th International Conference on Phenomena in Ionized Gases - Warsaw, Poland
Duration: 01 Jul 199901 Jul 1999

Conference

Conference24th International Conference on Phenomena in Ionized Gases
CountryPoland
CityWarsaw
Period01/07/199901/07/1999

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