Heating regimes observed in capacitive RF driven discharges

C.M.O. Mahony, Philip Steen, J. McFarland, William Graham

Research output: Contribution to conference › Paper

Original language	English
Pages	25-26
Number of pages	2
Publication status	Published - Jul 1999
Event	24th International Conference on Phenomena in Ionized Gases - Warsaw, Poland Duration: 01 Jul 1999 → 01 Jul 1999

Conference	24th International Conference on Phenomena in Ionized Gases
Country	Poland
City	Warsaw
Period	01/07/1999 → 01/07/1999

Cite this

@conference{efd14ff493824022b113415ec839b371,

title = "Heating regimes observed in capacitive RF driven discharges",

author = "C.M.O. Mahony and Philip Steen and J. McFarland and William Graham",

year = "1999",

month = jul,

language = "English",

pages = "25--26",

note = "24th International Conference on Phenomena in Ionized Gases ; Conference date: 01-07-1999 Through 01-07-1999",

}