We present a novel, to the best of our knowledge, Hartmann wave front sensor for extreme ultraviolet (EUV) spectral range with a numerical aperture (NA) of 0.15. The sensor has been calibrated using an EUV radiation source based on gas high harmonic generation. The calibration, together with simulation results, shows an accuracy beyond λ/39 root mean square (rms) at λ = 32 nm. The sensor is suitable for wave front measurement in the 10 nm to 45 nm spectral regime. This compact wave front sensor is high-vacuum compatible and designed for in situ operations, allowing wide applications for up-to-date EUV sources or high-NA EUV optics.
|Number of pages||4|
|Early online date||25 Jul 2020|
|Publication status||Published - 01 Aug 2020|
Bibliographical noteFunding Information:
Funding. Fundação para a Ciência e a Tecnologia (PD/00505/2012, PTDC/FIS-PLA/31868/2017, SFRH/BH/ 52419/2013); H2020 Future and Emerging Technologies (FET-Open VOXEL 665207); Laserlab-Europe (654148, LOA002209, LOA002440); Natural Science Foundation of Top Talent of SZTU (2020107).
© 2020 Optical Society of America
ASJC Scopus subject areas
- Atomic and Molecular Physics, and Optics