An imaging microscope, comprising a Schwarzchild condenser and zone plate optical arrangement, has been established on the Vulcan Nd-glass laser system at the Rutherford Appleton Laboratory (RAL). Images of simple test structures have been taken in X-ray transmission using doublet X-ray laser radiation at 23.2 nm and 23.6 nm from collisionally pumped Ne-like germanium. Image resolution of about 0.15 mum has been measured.
|Number of pages||4|
|Journal||INSTITUTE OF PHYSICS CONFERENCE SERIES|
|Publication status||Published - 1993|