Abstract
An imaging microscope, comprising a Schwarzchild condenser and zone plate optical arrangement, has been established on the Vulcan Nd-glass laser system at the Rutherford Appleton Laboratory (RAL). Images of simple test structures have been taken in X-ray transmission using doublet X-ray laser radiation at 23.2 nm and 23.6 nm from collisionally pumped Ne-like germanium. Image resolution of about 0.15 mum has been measured.
Original language | English |
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Pages (from-to) | 487-490 |
Number of pages | 4 |
Journal | INSTITUTE OF PHYSICS CONFERENCE SERIES |
Volume | 130 |
Publication status | Published - 1993 |