Investigation into the selectivity of CVD iron from Fe(CO)5 precursor on various metal and dielectric patterned substrates

Mervyn Armstrong, Michael Bain, Harold Gamble, Yee Low, John Montgomery

Research output: Contribution to journal › Article

Original language	English
Pages (from-to)	8998-9002
Number of pages	5
Journal	Surface and Coatings Technology
Volume	201(21-23)
Issue number	22-23 SPEC. ISS.
Publication status	Published - 25 Sep 2007

ASJC Scopus subject areas

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title = "Investigation into the selectivity of CVD iron from Fe(CO)5 precursor on various metal and dielectric patterned substrates",

author = "Mervyn Armstrong and Michael Bain and Harold Gamble and Yee Low and John Montgomery",

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T1 - Investigation into the selectivity of CVD iron from Fe(CO)5 precursor on various metal and dielectric patterned substrates

AU - Armstrong, Mervyn

AU - Bain, Michael

AU - Gamble, Harold

AU - Low, Yee

AU - Montgomery, John

PY - 2007/9/25

Y1 - 2007/9/25

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M3 - Article

VL - 201(21-23)

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EP - 9002

JO - Surface & Coatings Technology

JF - Surface & Coatings Technology

SN - 0257-8972

IS - 22-23 SPEC. ISS.

ER -