Investigation into the selectivity of CVD iron from Fe(CO)5 precursor on various metal and dielectric patterned substrates

Mervyn Armstrong, Michael Bain, Harold Gamble, Yee Low, John Montgomery

Research output: Contribution to journalArticle

6 Citations (Scopus)
Original languageEnglish
Pages (from-to)8998-9002
Number of pages5
JournalSurface and Coatings Technology
Volume201(21-23)
Issue number22-23 SPEC. ISS.
Publication statusPublished - 25 Sep 2007

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Condensed Matter Physics
  • Surfaces and Interfaces

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