Investigation into the selectivity of CVD iron from Fe(CO)5 precursor on various metal and dielectric patterned substrates

Mervyn Armstrong, Michael Bain, Harold Gamble, Yee Low, John Montgomery

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	8998-9002
Number of pages	5
Journal	Surface and Coatings Technology
Volume	201(21-23)
Issue number	22-23 SPEC. ISS.
Publication status	Published - 25 Sep 2007

ASJC Scopus subject areas

@article{575fdae7f0d84fa6bcf126cd1f413e77,

title = "Investigation into the selectivity of CVD iron from Fe(CO)5 precursor on various metal and dielectric patterned substrates",

author = "Mervyn Armstrong and Michael Bain and Harold Gamble and Yee Low and John Montgomery",

year = "2007",

month = sep,

day = "25",

language = "English",

volume = "201(21-23)",

pages = "8998--9002",

journal = "Surface & Coatings Technology",

issn = "0257-8972",

publisher = "Elsevier",

number = "22-23 SPEC. ISS.",

}

In: Surface and Coatings Technology, Vol. 201(21-23), No. 22-23 SPEC. ISS., 25.09.2007, p. 8998-9002.

Research output: Contribution to journal › Article › peer-review

TY - JOUR

T1 - Investigation into the selectivity of CVD iron from Fe(CO)5 precursor on various metal and dielectric patterned substrates

AU - Armstrong, Mervyn

AU - Bain, Michael

AU - Gamble, Harold

AU - Low, Yee

AU - Montgomery, John

PY - 2007/9/25

Y1 - 2007/9/25

UR - http://www.scopus.com/inward/record.url?scp=34547665548&partnerID=8YFLogxK

M3 - Article

VL - 201(21-23)

SP - 8998

EP - 9002

JO - Surface & Coatings Technology

JF - Surface & Coatings Technology

SN - 0257-8972

IS - 22-23 SPEC. ISS.

ER -