Investigation of Finish-cut of Microelectrodischarge Milling for Nano Surface Finish

R Mehfuz, M. Y. Ali

Research output: Contribution to journalArticle

Abstract

In this article, the machining conditions to achieve nanometric surface roughness in finish cut microelectrodischarge milling were investigated. For a constant gap voltage, the effect of feed rate and capacitance was studied on average surface roughness (Ra) and maximum peak-to-valley roughness height (Ry). Statistical models were developed using a three-level, two-factor experimental design. The developed models minimized Ra and Ry by desirability function approach. Maximum desirability was found to be more than 98%. The minimum values of Ra and Ry were 23 and 173 nm, respectively, for 1.00 μm s-1 feed rate and 0.01 nF capacitance. Verification experiments were conducted to check the accuracy of the models, where the responses were found to be very close to the predicted values. Thus, the developed models can be used to generate nanometric level surface finish, which are useful for many applications in microelectromechanical systems.
Original languageEnglish
Pages (from-to)1330-1334
JournalJournal of Vacuum Science & Technology B (microelectronics Processing & Phenomena)
Volume27
Issue number3
DOIs
Publication statusPublished - May 2009

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Surface roughness
Capacitance
Design of experiments
MEMS
Machining
Electric potential
Experiments
Statistical Models

Cite this

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title = "Investigation of Finish-cut of Microelectrodischarge Milling for Nano Surface Finish",
abstract = "In this article, the machining conditions to achieve nanometric surface roughness in finish cut microelectrodischarge milling were investigated. For a constant gap voltage, the effect of feed rate and capacitance was studied on average surface roughness (Ra) and maximum peak-to-valley roughness height (Ry). Statistical models were developed using a three-level, two-factor experimental design. The developed models minimized Ra and Ry by desirability function approach. Maximum desirability was found to be more than 98{\%}. The minimum values of Ra and Ry were 23 and 173 nm, respectively, for 1.00 μm s-1 feed rate and 0.01 nF capacitance. Verification experiments were conducted to check the accuracy of the models, where the responses were found to be very close to the predicted values. Thus, the developed models can be used to generate nanometric level surface finish, which are useful for many applications in microelectromechanical systems.",
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Investigation of Finish-cut of Microelectrodischarge Milling for Nano Surface Finish. / Mehfuz, R; Ali, M. Y.

In: Journal of Vacuum Science & Technology B (microelectronics Processing & Phenomena), Vol. 27, No. 3, 05.2009, p. 1330-1334.

Research output: Contribution to journalArticle

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