Investigation of p-type contamination in thin SOI layers during fabrication

S. Uppal, D.L. Gay, Alastair Armstrong, David McNeill, Paul Baine, Mervyn Armstrong, Harold Gamble, K. Yallop

Research output: Contribution to conference › Paper

Original language	English
Pages	0-0
Number of pages	1
Publication status	Published - Apr 1999
Event	MRS '99 Spring Meeting - San Francisco, United States Duration: 01 Apr 1999 → 01 Apr 1999

Cite this

@conference{1565b43a4a634b6cb3000f3bce78deb5,

title = "Investigation of p-type contamination in thin SOI layers during fabrication",

author = "S. Uppal and D.L. Gay and Alastair Armstrong and David McNeill and Paul Baine and Mervyn Armstrong and Harold Gamble and K. Yallop",

year = "1999",

month = apr,

language = "English",

pages = "0--0",

note = "MRS '99 Spring Meeting ; Conference date: 01-04-1999 Through 01-04-1999",

}