Investigation of p-type contamination in thin SOI layers during fabrication

S. Uppal, D.L. Gay, Alastair Armstrong, David McNeill, Paul Baine, Mervyn Armstrong, Harold Gamble, K. Yallop

Research output: Contribution to conferencePaper

Original languageEnglish
Pages0-0
Number of pages1
Publication statusPublished - Apr 1999
EventMRS '99 Spring Meeting - San Francisco, United States
Duration: 01 Apr 199901 Apr 1999

Conference

ConferenceMRS '99 Spring Meeting
CountryUnited States
CitySan Francisco
Period01/04/199901/04/1999

Cite this

Uppal, S., Gay, D. L., Armstrong, A., McNeill, D., Baine, P., Armstrong, M., ... Yallop, K. (1999). Investigation of p-type contamination in thin SOI layers during fabrication. 0-0. Paper presented at MRS '99 Spring Meeting, San Francisco, United States.