Investigation of the role of chemical-mechanical polishing in improving the performance of polysilicon TFTs

B Lee, L Quinn, Paul Baine, Neil Mitchell, Mervyn Armstrong, Harold Gamble

Research output: Contribution to conferencePaper

Original languageEnglish
Pages257-262
Number of pages6
Publication statusPublished - Apr 1999
EventSymposium on Flat-Panel Displays and Sensors-Principles, Materials and Processes held at the 1999 MRS Spring Meeting - San Francisco, United States
Duration: 01 Apr 200001 Apr 2000

Conference

ConferenceSymposium on Flat-Panel Displays and Sensors-Principles, Materials and Processes held at the 1999 MRS Spring Meeting
CountryUnited States
CitySan Francisco
Period01/04/200001/04/2000

Cite this

Lee, B., Quinn, L., Baine, P., Mitchell, N., Armstrong, M., & Gamble, H. (1999). Investigation of the role of chemical-mechanical polishing in improving the performance of polysilicon TFTs. 257-262. Paper presented at Symposium on Flat-Panel Displays and Sensors-Principles, Materials and Processes held at the 1999 MRS Spring Meeting, San Francisco, United States.