Investigation of the role of chemical-mechanical polishing in improving the performance of polysilicon TFTs

B Lee; L Quinn; Paul Baine; Neil Mitchell; Mervyn Armstrong; Harold Gamble

Investigation of the role of chemical-mechanical polishing in improving the performance of polysilicon TFTs

B Lee, L Quinn, Paul Baine, Neil Mitchell, Mervyn Armstrong, Harold Gamble

Research output: Contribution to conference › Paper

Original language	English
Pages	257-262
Number of pages	6
Publication status	Published - Apr 1999
Event	Symposium on Flat-Panel Displays and Sensors-Principles, Materials and Processes held at the 1999 MRS Spring Meeting - San Francisco, United States Duration: 01 Apr 2000 → 01 Apr 2000

Conference

Conference	Symposium on Flat-Panel Displays and Sensors-Principles, Materials and Processes held at the 1999 MRS Spring Meeting
Country/Territory	United States
City	San Francisco
Period	01/04/2000 → 01/04/2000

Cite this

@conference{741a7562cfe44db2a93753d267c8c91e,

title = "Investigation of the role of chemical-mechanical polishing in improving the performance of polysilicon TFTs",

author = "B Lee and L Quinn and Paul Baine and Neil Mitchell and Mervyn Armstrong and Harold Gamble",

year = "1999",

month = apr,

language = "English",

pages = "257--262",

note = "Symposium on Flat-Panel Displays and Sensors-Principles, Materials and Processes held at the 1999 MRS Spring Meeting ; Conference date: 01-04-2000 Through 01-04-2000",

}

Lee, B, Quinn, L, Baine, P, Mitchell, N , Armstrong, M & Gamble, H 1999, 'Investigation of the role of chemical-mechanical polishing in improving the performance of polysilicon TFTs', Paper presented at Symposium on Flat-Panel Displays and Sensors-Principles, Materials and Processes held at the 1999 MRS Spring Meeting, San Francisco, United States, 01/04/2000 - 01/04/2000 pp. 257-262.

Investigation of the role of chemical-mechanical polishing in improving the performance of polysilicon TFTs. / Lee, B; Quinn, L; Baine, Paul et al.
1999. 257-262 Paper presented at Symposium on Flat-Panel Displays and Sensors-Principles, Materials and Processes held at the 1999 MRS Spring Meeting, San Francisco, United States.

Research output: Contribution to conference › Paper

TY - CONF

T1 - Investigation of the role of chemical-mechanical polishing in improving the performance of polysilicon TFTs

AU - Lee, B

AU - Quinn, L

AU - Baine, Paul

AU - Mitchell, Neil

AU - Armstrong, Mervyn

AU - Gamble, Harold

PY - 1999/4

Y1 - 1999/4

UR - http://www.scopus.com/inward/record.url?scp=0033719993&partnerID=8YFLogxK

M3 - Paper

SP - 257

EP - 262

T2 - Symposium on Flat-Panel Displays and Sensors-Principles, Materials and Processes held at the 1999 MRS Spring Meeting

Y2 - 1 April 2000 through 1 April 2000

ER -

Investigation of the role of chemical-mechanical polishing in improving the performance of polysilicon TFTs

Conference

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Cite this