Laser-annealing of sputtered silicon for wafer bonding applications

Mervyn Armstrong, Harold Gamble, Richard Hurley

Research output: Contribution to conferencePaper

Original languageEnglish
Pages0-0
Number of pages1
Publication statusPublished - Sep 2004
Event10th Joint Vacuum Conf - Portoroz, Slovenia
Duration: 01 Sep 200401 Sep 2004

Conference

Conference10th Joint Vacuum Conf
CountrySlovenia
CityPortoroz
Period01/09/200401/09/2004

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