Laser-annealing of sputtered silicon for wafer bonding applications

Mervyn Armstrong, Harold Gamble, Richard Hurley

Research output: Contribution to conferencePaper

Original languageEnglish
Pages0-0
Number of pages1
Publication statusPublished - Sep 2004
Event10th Joint Vacuum Conf - Portoroz, Slovenia
Duration: 01 Sep 200401 Sep 2004

Conference

Conference10th Joint Vacuum Conf
CountrySlovenia
CityPortoroz
Period01/09/200401/09/2004

Cite this

Armstrong, M., Gamble, H., & Hurley, R. (2004). Laser-annealing of sputtered silicon for wafer bonding applications. 0-0. Paper presented at 10th Joint Vacuum Conf, Portoroz, Slovenia.