Low Temperature Bonding of PECVD Silicon Dioxide Layers

Paul Baine, Michael Bain, David McNeill, Harold Gamble, Mervyn Armstrong

Research output: Contribution to journalArticlepeer-review

6 Citations (Scopus)
Original languageEnglish
Pages (from-to)165-173
Number of pages9
JournalECS Transactions
Volume3(6)
Issue number6
Publication statusPublished - Nov 2006
Event210th Electrochemical Society Meeting - Cancun, Mexico
Duration: 01 Jan 200601 Jan 2006
https://www.electrochem.org/210

ASJC Scopus subject areas

  • General Engineering

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