Low Temperature Bonding of PECVD Silicon Dioxide Layers

Paul Baine, Michael Bain, David McNeill, Harold Gamble, Mervyn Armstrong

Research output: Contribution to journalArticle

5 Citations (Scopus)
Original languageEnglish
Pages (from-to)165-173
Number of pages9
JournalECS Transactions
Volume3(6)
Issue number6
Publication statusPublished - Nov 2006
Event210th Electrochemical Society Meeting, Semiconductor Wafer Bonding : Science, Technology and Application - Cancun, Mexico
Duration: 01 Nov 200601 Nov 2006

Cite this