Low temperature epitaxial silicon growth in a rapid thermal processor

Research output: Contribution to conference › Paper

Original language	English
Pages	235-240
Number of pages	6
Publication status	Published - May 1991
Event	MRS Symposium Proceedings - Anaheim, California, United States Duration: 01 May 1991 → 01 May 1991

Cite this

@conference{9cb5e6a0a7134590aa3bef530ae32400,

title = "Low temperature epitaxial silicon growth in a rapid thermal processor",

author = "David McNeill and Harold Gamble and Mervyn Armstrong",

year = "1991",

month = may,

language = "English",

pages = "235--240",

note = "MRS Symposium Proceedings ; Conference date: 01-05-1991 Through 01-05-1991",

}