Low temperature epitaxial silicon growth in a rapid thermal processor

Research output: Contribution to conferencePaper

Original languageEnglish
Pages235-240
Number of pages6
Publication statusPublished - May 1991
EventMRS Symposium Proceedings - Anaheim, California, United States
Duration: 01 May 199101 May 1991

Conference

ConferenceMRS Symposium Proceedings
CountryUnited States
CityAnaheim, California
Period01/05/199101/05/1991

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