Low temperature epitaxy of Si/Si1-xGex/Si multi-layers by low pressure RTCVD for very thin SOI applications

David McNeill, D.L. Gay, X. Li, Mervyn Armstrong, Harold Gamble

Research output: Contribution to conferencePaper

Original languageEnglish
Number of pages7
Publication statusPublished - Apr 1998
EventMRS Symposium Proceedings - San Francisco, United States
Duration: 01 Apr 199801 Apr 1998


ConferenceMRS Symposium Proceedings
Country/TerritoryUnited States
CitySan Francisco

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