Low-temperature plasma enhanced chemical vapor deposition of tungsten and tungsten nitride

Mervyn Armstrong, Michael Bain, Harold Gamble

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)329-333
Number of pages5
JournalJournal of Materials Science: Materials in Electronics
Volume14
Issue number5-7
Publication statusPublished - May 2003

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Materials Science(all)
  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

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