Low Temperature Plasma enhanced Chemical Vapour Deposition of Tungsten and Tungsten Nitride.

Mervyn Armstrong, Michael Bain, Harold Gamble

Research output: Contribution to conferencePaper

Original languageEnglish
Pages0-0
Number of pages1
Publication statusPublished - Jun 2002
Event4th Intl Conf on Materials for Microelectronics - Espoo, Finland
Duration: 01 Jun 200201 Jun 2002

Conference

Conference4th Intl Conf on Materials for Microelectronics
CountryFinland
CityEspoo
Period01/06/200201/06/2002

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