Low Temperature Plasma enhanced Chemical Vapour Deposition of Tungsten and Tungsten Nitride.

Mervyn Armstrong, Michael Bain, Harold Gamble

Research output: Contribution to conference › Paper

Original language	English
Pages	0-0
Number of pages	1
Publication status	Published - Jun 2002
Event	4th Intl Conf on Materials for Microelectronics - Espoo, Finland Duration: 01 Jun 2002 → 01 Jun 2002

Conference	4th Intl Conf on Materials for Microelectronics
Country/Territory	Finland
City	Espoo
Period	01/06/2002 → 01/06/2002

Cite this

@conference{fda8a124c7f5404b8c23b61828779fc9,

title = "Low Temperature Plasma enhanced Chemical Vapour Deposition of Tungsten and Tungsten Nitride.",

author = "Mervyn Armstrong and Michael Bain and Harold Gamble",

year = "2002",

month = jun,

language = "English",

pages = "0--0",

note = "4th Intl Conf on Materials for Microelectronics ; Conference date: 01-06-2002 Through 01-06-2002",

}