Low temperature processes for manufacture of germanium MOS transistors

Paul Baine; Harold Gamble; Mervyn Armstrong; Neil Mitchell; David McNeill; Paul Rainey; Yee Low; Y.W. Low; D. Tantraviwat

Low temperature processes for manufacture of germanium MOS transistors

Paul Baine, Harold Gamble, Mervyn Armstrong, Neil Mitchell, David McNeill, Paul Rainey, Yee Low, Y.W. Low, D. Tantraviwat

Research output: Contribution to conference › Paper

Original language	English
Pages	143-144
Number of pages	2
Publication status	Published - Jan 2009
Event	Proceedings of EuroSOI 2009 - Goteborg, Sweden Duration: 01 Jan 2009 → 01 Jan 2009

Conference

Conference	Proceedings of EuroSOI 2009
Country	Sweden
City	Goteborg
Period	01/01/2009 → 01/01/2009

Cite this

Baine, P., Gamble, H., Armstrong, M., Mitchell, N., McNeill, D., Rainey, P., ... Tantraviwat, D. (2009). Low temperature processes for manufacture of germanium MOS transistors. 143-144. Paper presented at Proceedings of EuroSOI 2009, Goteborg, Sweden.

@conference{9445881f548347d4a92f9469aaf2217f,

title = "Low temperature processes for manufacture of germanium MOS transistors",

author = "Paul Baine and Harold Gamble and Mervyn Armstrong and Neil Mitchell and David McNeill and Paul Rainey and Yee Low and Y.W. Low and D. Tantraviwat",

year = "2009",

month = "1",

language = "English",

pages = "143--144",

note = "Proceedings of EuroSOI 2009 ; Conference date: 01-01-2009 Through 01-01-2009",

}