Low temperature processes for manufacture of germanium MOS transistors

Paul Baine; Harold Gamble; Mervyn Armstrong; Neil Mitchell; David McNeill; Paul Rainey; Yee Low; Y.W. Low; D. Tantraviwat

Low temperature processes for manufacture of germanium MOS transistors

Paul Baine, Harold Gamble, Mervyn Armstrong, Neil Mitchell, David McNeill, Paul Rainey, Yee Low, Y.W. Low, D. Tantraviwat

Research output: Contribution to conference › Paper

Original language	English
Pages	143-144
Number of pages	2
Publication status	Published - Jan 2009
Event	Proceedings of EuroSOI 2009 - Goteborg, Sweden Duration: 01 Jan 2009 → 01 Jan 2009

Conference

Conference	Proceedings of EuroSOI 2009
Country	Sweden
City	Goteborg
Period	01/01/2009 → 01/01/2009

Cite this

Baine, P., Gamble, H., Armstrong, M., Mitchell, N., McNeill, D., Rainey, P., Low, Y., Low, Y. W., & Tantraviwat, D. (2009). Low temperature processes for manufacture of germanium MOS transistors. 143-144. Paper presented at Proceedings of EuroSOI 2009, Goteborg, Sweden.

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title = "Low temperature processes for manufacture of germanium MOS transistors",

author = "Paul Baine and Harold Gamble and Mervyn Armstrong and Neil Mitchell and David McNeill and Paul Rainey and Yee Low and Y.W. Low and D. Tantraviwat",

year = "2009",

month = jan,

language = "English",

pages = "143--144",

note = "Proceedings of EuroSOI 2009 ; Conference date: 01-01-2009 Through 01-01-2009",

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TY - CONF

T1 - Low temperature processes for manufacture of germanium MOS transistors

AU - Baine, Paul

AU - Gamble, Harold

AU - Armstrong, Mervyn

AU - Mitchell, Neil

AU - McNeill, David

AU - Rainey, Paul

AU - Low, Yee

AU - Low, Y.W.

AU - Tantraviwat, D.

PY - 2009/1

Y1 - 2009/1

M3 - Paper

SP - 143

EP - 144

T2 - Proceedings of EuroSOI 2009

Y2 - 1 January 2009 through 1 January 2009

ER -