Manufacture of hemi-spherical resonators using printable fused silica glass

Yahya Atwa; Hamza Shakeel

doi:10.1109/INERTIAL56358.2023.10103948

Manufacture of hemi-spherical resonators using printable fused silica glass

Yahya Atwa, Hamza Shakeel

School of Electronics, Electrical Engineering and Computer Science

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Citation (Scopus)

131 Downloads (Pure)

Abstract

In this paper, we present a new method for manufacturing millimeter-sized three-dimensional (3D) hemi-spherical resonators (HSRs) using a printable fused silica (FS) glass suspension. Our manufacturing process involves a combination of 3D printing, replication molding and casting steps to produce a complex FS-based HSR geometry. As proof of concept, we made a 9.5 mm-diameter and 0.5mm-thick resonator that was coated with thin films of chromium and gold (132nm). We tested the resonator using electrostatic actuation and detection methods and were able to detect a single resonance mode at 6.74 kHz with an experimental quality factor of approximately 1,540. This manufacturing method is easy to use and yields high results (greater than 95%), but it does require further optimization to improve device performance due to relatively high surface roughness.

Original language	English
Title of host publication	Proceedings of the 10th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2023
Publisher	Institute of Electrical and Electronics Engineers Inc.
Number of pages	4
ISBN (Electronic)	9781665451475
ISBN (Print)	9781665451482
DOIs	https://doi.org/10.1109/INERTIAL56358.2023.10103948
Publication status	Published - 25 Apr 2023
Event	10th International Symposium on Inertial Sensors and Systems, IEEE INERTIAL 2023 - Lihue, United States Duration: 28 Mar 2023 → 31 Mar 2023 https://2023.ieee-inertial.org/

Publication series

Name	International Symposium on Inertial Sensors and Systems (ISISS): Proceedings
ISSN (Print)	2377-3464
ISSN (Electronic)	2377-3480

Conference

Conference	10th International Symposium on Inertial Sensors and Systems, IEEE INERTIAL 2023
Abbreviated title	ISISS
Country/Territory	United States
City	Lihue
Period	28/03/2023 → 31/03/2023
Internet address	https://2023.ieee-inertial.org/

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10.1109/INERTIAL56358.2023.10103948Licence: Unspecified

Manufacture of hemi-spherical resonators using printable fused silica glass
Copyright 2023 IEEE. This work is made available online in accordance with the publisher’s policies. Please refer to any applicable terms of use of the publisher.
Accepted author manuscript, 660 KBLicence: Unspecified

R1508ECS: In-situ Mass and Elasticity Monitoring Sensors (iMEMS) for Characterization of Thin Films at High Temperature
Shakeel, H. (PI)
06/01/2021 → …
Project: Research

Cite this

Atwa, Y., & Shakeel, H. (2023). Manufacture of hemi-spherical resonators using printable fused silica glass. In Proceedings of the 10th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2023 (International Symposium on Inertial Sensors and Systems (ISISS): Proceedings). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/INERTIAL56358.2023.10103948

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title = "Manufacture of hemi-spherical resonators using printable fused silica glass",

abstract = "In this paper, we present a new method for manufacturing millimeter-sized three-dimensional (3D) hemi-spherical resonators (HSRs) using a printable fused silica (FS) glass suspension. Our manufacturing process involves a combination of 3D printing, replication molding and casting steps to produce a complex FS-based HSR geometry. As proof of concept, we made a 9.5 mm-diameter and 0.5mm-thick resonator that was coated with thin films of chromium and gold (132nm). We tested the resonator using electrostatic actuation and detection methods and were able to detect a single resonance mode at 6.74 kHz with an experimental quality factor of approximately 1,540. This manufacturing method is easy to use and yields high results (greater than 95%), but it does require further optimization to improve device performance due to relatively high surface roughness.",

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Atwa, Y & Shakeel, H 2023, Manufacture of hemi-spherical resonators using printable fused silica glass. in Proceedings of the 10th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2023. International Symposium on Inertial Sensors and Systems (ISISS): Proceedings, Institute of Electrical and Electronics Engineers Inc., 10th International Symposium on Inertial Sensors and Systems, IEEE INERTIAL 2023, Lihue, United States, 28/03/2023. https://doi.org/10.1109/INERTIAL56358.2023.10103948

Manufacture of hemi-spherical resonators using printable fused silica glass. / Atwa, Yahya; Shakeel, Hamza.
Proceedings of the 10th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2023. Institute of Electrical and Electronics Engineers Inc., 2023. (International Symposium on Inertial Sensors and Systems (ISISS): Proceedings).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

TY - GEN

T1 - Manufacture of hemi-spherical resonators using printable fused silica glass

AU - Atwa, Yahya

AU - Shakeel, Hamza

PY - 2023/4/25

Y1 - 2023/4/25

N2 - In this paper, we present a new method for manufacturing millimeter-sized three-dimensional (3D) hemi-spherical resonators (HSRs) using a printable fused silica (FS) glass suspension. Our manufacturing process involves a combination of 3D printing, replication molding and casting steps to produce a complex FS-based HSR geometry. As proof of concept, we made a 9.5 mm-diameter and 0.5mm-thick resonator that was coated with thin films of chromium and gold (132nm). We tested the resonator using electrostatic actuation and detection methods and were able to detect a single resonance mode at 6.74 kHz with an experimental quality factor of approximately 1,540. This manufacturing method is easy to use and yields high results (greater than 95%), but it does require further optimization to improve device performance due to relatively high surface roughness.

AB - In this paper, we present a new method for manufacturing millimeter-sized three-dimensional (3D) hemi-spherical resonators (HSRs) using a printable fused silica (FS) glass suspension. Our manufacturing process involves a combination of 3D printing, replication molding and casting steps to produce a complex FS-based HSR geometry. As proof of concept, we made a 9.5 mm-diameter and 0.5mm-thick resonator that was coated with thin films of chromium and gold (132nm). We tested the resonator using electrostatic actuation and detection methods and were able to detect a single resonance mode at 6.74 kHz with an experimental quality factor of approximately 1,540. This manufacturing method is easy to use and yields high results (greater than 95%), but it does require further optimization to improve device performance due to relatively high surface roughness.

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DO - 10.1109/INERTIAL56358.2023.10103948

M3 - Conference contribution

SN - 9781665451482

T3 - International Symposium on Inertial Sensors and Systems (ISISS): Proceedings

BT - Proceedings of the 10th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2023

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 10th International Symposium on Inertial Sensors and Systems, IEEE INERTIAL 2023

Y2 - 28 March 2023 through 31 March 2023

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Atwa Y, Shakeel H. Manufacture of hemi-spherical resonators using printable fused silica glass. In Proceedings of the 10th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2023. Institute of Electrical and Electronics Engineers Inc. 2023. (International Symposium on Inertial Sensors and Systems (ISISS): Proceedings). doi: 10.1109/INERTIAL56358.2023.10103948

Manufacture of hemi-spherical resonators using printable fused silica glass

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Projects

R1508ECS: In-situ Mass and Elasticity Monitoring Sensors (iMEMS) for Characterization of Thin Films at High Temperature

Cite this