Manufacture of hemi-spherical resonators using printable fused silica glass

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Abstract

In this paper, we present a new method for manufacturing millimeter-sized three-dimensional (3D) hemi-spherical resonators (HSRs) using a printable fused silica (FS) glass suspension. Our manufacturing process involves a combination of 3D printing, replication molding and casting steps to produce a complex FS-based HSR geometry. As proof of concept, we made a 9.5 mm-diameter and 0.5mm-thick resonator that was coated with thin films of chromium and gold (132nm). We tested the resonator using electrostatic actuation and detection methods and were able to detect a single resonance mode at 6.74 kHz with an experimental quality factor of approximately 1,540. This manufacturing method is easy to use and yields high results (greater than 95%), but it does require further optimization to improve device performance due to relatively high surface roughness.

Original languageEnglish
Title of host publication2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL): proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
Number of pages4
ISBN (Electronic)9781665451475
ISBN (Print)9781665451482
DOIs
Publication statusPublished - 25 Apr 2023
Event10th International Symposium on Inertial Sensors and Systems, IEEE INERTIAL 2023 - Lihue, United States
Duration: 28 Mar 202331 Mar 2023
https://2023.ieee-inertial.org/

Publication series

NameIEEE International Symposium on Inertial Sensors and Systems (INERTIAL): proceedings
ISSN (Print)2377-3464
ISSN (Electronic)2377-3480

Conference

Conference10th International Symposium on Inertial Sensors and Systems, IEEE INERTIAL 2023
Abbreviated titleISISS
Country/TerritoryUnited States
CityLihue
Period28/03/202331/03/2023
Internet address

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