Manufacturing processes for WSi2-GPSOI substrates and their influence on cross-talk suppression and inductance

Mervyn Armstrong, Michael Bain, Paul Baine, Harold Gamble, David McNeill

Research output: Contribution to conferencePaper

Original languageEnglish
Number of pages7
Publication statusPublished - Sep 2003
EventElectrochemical Society Proc, v 19, Semiconductor Wafer Bonding VII: Science, Technology, & Applications - Paris, France
Duration: 01 Sep 200301 Sep 2003

Conference

ConferenceElectrochemical Society Proc, v 19, Semiconductor Wafer Bonding VII: Science, Technology, & Applications
CountryFrance
CityParis
Period01/09/200301/09/2003

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