Mask assisted fabrication of nanoislands of BiFeO3 by ion beam milling

A. Morelli; F. Johann; N. Schammelt; D. McGrouther; I. Vrejoiu

doi:10.1063/1.4801904

Mask assisted fabrication of nanoislands of BiFeO3 by ion beam milling

A. Morelli^*, F. Johann, N. Schammelt, D. McGrouther, I. Vrejoiu

^*Corresponding author for this work

School of Mathematics and Physics

Research output: Contribution to journal › Article › peer-review

20 Citations (Scopus)

Abstract

We report on a low-damage method for direct and rapid fabrication of arrays of epitaxial BiFeO3(BFO) nanoislands. An array of aluminium dots is evaporated through a stencil mask on top of an epitaxial BiFeO3 thin film. Low energy focused ion beam milling of an area several microns wide containing the array-covered film leads to removal of the bismuth ferrite in between the aluminium-masked dots. By chemical etching of the remaining aluminium, nanoscale epitaxial bismuth ferrite islands with diameter ∼250 nm were obtained. Piezoresponse force microscopy showed that as-fabricated structures exhibited good piezoelectric and ferroelectric properties, with polarization state retention of several days.

Original language	English
Article number	154101
Pages (from-to)	1-4
Number of pages	4
Journal	Journal of Applied Physics
Volume	113
DOIs	https://doi.org/10.1063/1.4801904
Publication status	Published - 2013

Keywords

FILMS

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10.1063/1.4801904

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title = "Mask assisted fabrication of nanoislands of BiFeO3 by ion beam milling",

abstract = "We report on a low-damage method for direct and rapid fabrication of arrays of epitaxial BiFeO3(BFO) nanoislands. An array of aluminium dots is evaporated through a stencil mask on top of an epitaxial BiFeO3 thin film. Low energy focused ion beam milling of an area several microns wide containing the array-covered film leads to removal of the bismuth ferrite in between the aluminium-masked dots. By chemical etching of the remaining aluminium, nanoscale epitaxial bismuth ferrite islands with diameter ∼250 nm were obtained. Piezoresponse force microscopy showed that as-fabricated structures exhibited good piezoelectric and ferroelectric properties, with polarization state retention of several days.",

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T1 - Mask assisted fabrication of nanoislands of BiFeO3 by ion beam milling

AU - Morelli, A.

AU - Johann, F.

AU - Schammelt, N.

AU - McGrouther, D.

AU - Vrejoiu, I.

PY - 2013

Y1 - 2013

N2 - We report on a low-damage method for direct and rapid fabrication of arrays of epitaxial BiFeO3(BFO) nanoislands. An array of aluminium dots is evaporated through a stencil mask on top of an epitaxial BiFeO3 thin film. Low energy focused ion beam milling of an area several microns wide containing the array-covered film leads to removal of the bismuth ferrite in between the aluminium-masked dots. By chemical etching of the remaining aluminium, nanoscale epitaxial bismuth ferrite islands with diameter ∼250 nm were obtained. Piezoresponse force microscopy showed that as-fabricated structures exhibited good piezoelectric and ferroelectric properties, with polarization state retention of several days.

AB - We report on a low-damage method for direct and rapid fabrication of arrays of epitaxial BiFeO3(BFO) nanoislands. An array of aluminium dots is evaporated through a stencil mask on top of an epitaxial BiFeO3 thin film. Low energy focused ion beam milling of an area several microns wide containing the array-covered film leads to removal of the bismuth ferrite in between the aluminium-masked dots. By chemical etching of the remaining aluminium, nanoscale epitaxial bismuth ferrite islands with diameter ∼250 nm were obtained. Piezoresponse force microscopy showed that as-fabricated structures exhibited good piezoelectric and ferroelectric properties, with polarization state retention of several days.

KW - FILMS

U2 - 10.1063/1.4801904

DO - 10.1063/1.4801904

M3 - Article

SN - 0021-8979

VL - 113

SP - 1

EP - 4

JO - Journal of Applied Physics

JF - Journal of Applied Physics

M1 - 154101

ER -

Mask assisted fabrication of nanoislands of BiFeO3 by ion beam milling

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