Matrix Factorisation Techniques for Endpoint Detection in Plasma Etching

E. Ragnoli, Seán McLoone, J. Ringwood, N. MacGearailt

Research output: Contribution to conferencePaper

2 Citations (Scopus)
Original languageEnglish
Publication statusPublished - 2008
Event19th IEEE/SEMI Advanced Semiconductor Manufacturing Conference - Boston, United States
Duration: 05 May 200807 May 2008

Conference

Conference19th IEEE/SEMI Advanced Semiconductor Manufacturing Conference
CountryUnited States
CityBoston
Period05/05/200807/05/2008

Cite this

Ragnoli, E., McLoone, S., Ringwood, J., & MacGearailt, N. (2008). Matrix Factorisation Techniques for Endpoint Detection in Plasma Etching. Paper presented at 19th IEEE/SEMI Advanced Semiconductor Manufacturing Conference, Boston, United States.