Matrix Factorisation Techniques for Endpoint Detection in Plasma Etching

E. Ragnoli, Seán McLoone, J. Ringwood, N. MacGearailt

Research output: Contribution to conference › Paper › peer-review

Original language	English
Publication status	Published - 2008
Event	19th IEEE/SEMI Advanced Semiconductor Manufacturing Conference - Boston, United States Duration: 05 May 2008 → 07 May 2008

Conference	19th IEEE/SEMI Advanced Semiconductor Manufacturing Conference
Country/Territory	United States
City	Boston
Period	05/05/2008 → 07/05/2008

Cite this

@conference{acf21e96b6764e60b6172cb78925eac4,

title = "Matrix Factorisation Techniques for Endpoint Detection in Plasma Etching",

author = "E. Ragnoli and Se{\'a}n McLoone and J. Ringwood and N. MacGearailt",

year = "2008",

language = "English",

note = "19th IEEE/SEMI Advanced Semiconductor Manufacturing Conference ; Conference date: 05-05-2008 Through 07-05-2008",

}