Micro-machined Passive Valves: Fabrication Techniques, Characterisation and their Application

Daniel Bien, Neil Mitchell, Harold Gamble

Research output: Chapter in Book/Report/Conference proceedingChapter

Original languageEnglish
Title of host publicationMEMS/NEMS Handbook - Techniques and Applications, Volume 3
EditorsC.T. Leondes
PublisherSpringer
Publication statusPublished - May 2006

Bibliographical note

Chapter Number: 3

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