Original language | English |
---|---|
Journal | Semiconductor Science and Technology |
Volume | 13 |
Issue number | 6 |
Publication status | Published - 1998 |
Micro-Raman spectroscopic study of two-dimensional stress distribution in poly-Si induced by CoSi2 patterns
Bibo Li, Fumin Huang, Shulin Zhang
Research output: Contribution to journal › Article › peer-review
9
Citations
(Scopus)