Micro-Raman spectroscopic study of two-dimensional stress distribution in poly-Si induced by CoSi2 patterns

Bibo Li, Fumin Huang, Shulin Zhang

Research output: Contribution to journalArticlepeer-review

9 Citations (Scopus)
Original languageEnglish
JournalSemiconductor Science and Technology
Volume13
Issue number6
Publication statusPublished - 1998

Cite this