Micro-Raman spectroscopic study of two-dimensional stress distribution in poly-Si induced by CoSi2 patterns

Bibo Li, Fumin Huang, Shulin Zhang

Research output: Contribution to journal › Article › peer-review

Original language	English
Journal	Semiconductor Science and Technology
Volume	13
Issue number	6
Publication status	Published - 1998

Cite this

@article{4365c7131e86421daaf99dbc5b8925e6,

title = "Micro-Raman spectroscopic study of two-dimensional stress distribution in poly-Si induced by CoSi2 patterns",

author = "Bibo Li and Fumin Huang and Shulin Zhang",

year = "1998",

language = "English",

volume = "13",

journal = "Semiconductor Science and Technology",

issn = "0268-1242",

publisher = "IOP Publishing Ltd",

number = "6",

}